Leybold Optics GmbH

Laser and Mirror Coatings

Laser coatings require high reflectivity, low losses, high performance over life time and a high Laser damage threshold. Leybold Optics provides equipment and coating processes for the whole spectral range from DUV, VIS, NIR up to IR. The evaporation processes and the equipments are tailored for the different wavelength applications, SYRUSpro DUV for DUV wavelength range, SYRUSpro IR for the IR–wavelength range and for VIS and NIR the coating systems from the SYRUSpro family. To achieve the best performance, the coating systems are also equipped with the APSpro advanced plasma source or the LION 300 ECWR–plasma source to achieve dense and shift free layers with a high reflectivity and low losses of the coatings.

Laser coatings by sputtering... here, Leybold Optics also provides the right solution, with the Helios family of sputtering systems for optical applications. Dense and shift free layers with low losses, high reflectivity and low scattering can be obtained with the Helios. Equipped with a load lock system, while keeping the coating chamber under vacuum, Helios is perfectly suited for clean room installation, and is the right choice for a high productivity under clean room environment.

For broad band mirrors with enhanced layer systems, we can provide a variety of coating processes with the coating systems of the SYRUSpro and Helios family. One special application is cold light mirrors for projector applications, where high light output is required by di-electric mirror coatings over highly curved substrates. Here the SYRUSpro 1510 with swivel mounted planetary system is the right choice. The planets can be adjusted to the appropriate tilting angle to achieve the best uniformity over highly curved substrates.

 

Machines


 

HELIOS family

HELIOS

Sputtering tool for highest quality optical coatings featuring very low absorption and scattering more...
 

SYRUSpro family

SYRUSpro

Evaporation batch coating systems for any requirements in the field of precision optics more...
 

 

Detailed Information


  


The production capabilities for optical multilayer coatings were improved dramatically in the last decade. So called “shift free” coatings have become a standard in the coating production. more...  
 

Direct optical monitoring plays a key role to improve the layer thickness accuracy and takes advantage of error compensation effects. more...
 

For the production of high performance multilayer systems optical monitoring is essential. Substantial progress was achieved by the introduction of direct monitoring on the rotating substrate holder. more... 
 


For Notch Filters, Rugate designs with a small index contrast and apodisation are well known in the literature. The required deposition of gradient index layers or so called flip flop structures is very complicated and difficult to manufacture. more...  



Plasma or ion sources are key components in nowadays box coaters for precision optic application. Various designs have been presented in the past, but only few are in use in large numbers, like the Mark II oradvanced plasma source (APS) source. more...  



The performance of a box coater with double rotating substrate holders in combination with direct optical monitoring was investigated. The reproducibility and uniformity results of a multilayer system with tight specifications will be presented. more...  
 





The advantage of PARMS for the manufacturing of high performance low loss coatings is demonstrated with UV- and VIS band pass filter based on HfO2 respectively Nb2O5 and SiO2. more...  




© 2012 LEYBOLD OPTICS