Optoelectronics: Connecting Light and Matter |
||||
|
Optoelectronics is using the properties of optical thin films to combine them with electronics, often in units of small dimensions. Touch screens used for mobile phones and also for PC need ITO coatings, AR and “easy clean“ coatings as well. Our inline sputtering machines like the A600V offer ITO layers of high conductivity and transparency, but also other various metal coatings. Semiconductor lasers need high reflectivity laser mirrors on a small scale substrate, but with the highest performance. The Helios sputtering system offers here the right solution with excellent laser mirrors by sputtering, load lock and clean room environment. But Leybold Optics has also the right coating system portfolio for electronic applications. For metallisation of sensors, high power transistors, MEMS, gap and protection layers for thin film heads and more… our SYRUSpro family with optimised electron beam guns for metal evaporation and the Helios family for sputtering of metals are the right choice. Tailored evaporation systems for lift-off applications in electronics are our LAB machines. For special solutions combining wafer handling, load lock systems, sputtering and evaporation we are providing customized and flexible solutions with our cluster systems. Questions, inquiries, comments? Get in touch with us at |
||||
Machines |
||||
LAB family Series of batch coating systems using electron beam evaporation and plasma deposition technologies. more... |
Cluster Tool family Coating systems configured à la carte using sputter and evaproation modules. more... |
In-Line Sputter Tools Flexible, modular multi-chamber sputter systems from research applications to mass production. more... |
||
HELIOS family Sputtering tool for highest quality optical coatings featuring very low absorption and scattering more... |
NESSY Sputter system for the production of EUV extreme ultraviolet mirrors under UHV conditions more... |
SYRUSpro family Evaporation batch coating systems for any requirements in the field of precision optics more... |
||
Parts, Consumables and Service |
||||
 |
 |
 |
||
 |
 |
|||
