Leybold Optics GmbH

The LAB H family: specialists for lift-off and electronics applications

Lift-off applications require special chamber geometries in order to ensure narrow incident angles during deposition processes. Our LAB H family is optimized for these needs, including appropriate substrate holders, pumping systems and, optionally, automatic handling systems for uninterrupted operation under vacuum. Moreover, a high degree of flexibility in the configuration of the systems is another highlight of the LAB H series, enabling us to respond to specific customer requests.

Our client list includes world-leading commercial and institutional research departments, as well as manufacturers of electronic components on industrial scale.
 

Features and Options:

  • Stainless steel chambers, optionally conditioned for UHV processes
  • High performance pumping systems, incl. cryogenic pumps, dry pumps
  • Contamination free substrate heating
  • Glow discharge plasma cleaning
  • Customized substrate holders: calotte, pyramid, plane
  • Tiltable substrate holders, drives
  • Automated substrate handling, wafer loading / unloading systems
  • Automatic refill of evaporation material

Chamber Dimensions
(Width x Height x Depth in mm):

  • LAB 600 H: 600 x 1100 x 620
  • LAB 700 H: 700 x 950 x 720
  • Other formats on request

 

Technical Data:

  • Pressure after 15 min < 7 x 10-7 mbar
  • Pressure after 24 hrs < 5 x 10-8 mbar

 

 

 

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Questions, inquiries, comments?
Get in touch with us at

Telephone: +49 6023 500-463 and -467
E-mail: sales.optoelectronics@leyboldoptics.com


 LAB family Systems and References
    (PDF - 707 kb)

LAB family Equipment (PDF - 966 kb)
 

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