Leybold Optics GmbH

Leybold Optics Clusters: all-in-one devices for electronics

Leybold Optics Cluster tools are the system of choice for a variety of electronics and optoelectronics applications. Many of these require specific process sequences, such as deposition via sputtering and evaporation, cleaning or etching, without breaking the vacuum. Leybold Optics Cluster tools offer you the possibility to configure a vacuum processing system exactly according to your wishes. Typically, the best solution is a multi-chamber set-up with load-lock, handling, and process stations. Customized substrate holders and high-performance pumping stages complement the individual solution.

Our Cluster tool client list includes world-leading commercial and institutional research departments, as well as manufacturers of (opto-)electronic components on industrial scale. 
 

Features and Options:

  • Etch and cleaning chambers, inverse sputter etchers
  • Evaporation chambers
  • Sputter chambers
  • Stainless steel chambers, optionally conditioned for UHV processes
  • High performance pumping systems, incl. cryogenic pumps, dry pumps
  • Contamination free substrate heating
  • Customized substrate holders
  • Tiltable substrate holders, drives
  • Automated substrate handling
  • Cassette load-lock chambers, wafer loading / unloading systems
  • Central handlers with vacuum robots
  • Automatic refill of evaporation material
  • Chamber dimensions on demand
  Cluster

Questions, inquiries, comments?
Get in touch with us at

Telephone: +49 6023 500-463 and -467
E-mail: sales.optoelectronics@leyboldoptics.com

 Cluster Systems Brochure (PDF - 548 kb) 

Cluster
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