Leybold Optics Clusters: all-in-one devices for electronics |
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| Leybold Optics Cluster tools are the system of choice for a variety of electronics and optoelectronics applications. Many of these require specific process sequences, such as deposition via sputtering and evaporation, cleaning or etching, without breaking the vacuum. Leybold Optics Cluster tools offer you the possibility to configure a vacuum processing system exactly according to your wishes. Typically, the best solution is a multi-chamber set-up with load-lock, handling, and process stations. Customized substrate holders and high-performance pumping stages complement the individual solution. Our Cluster tool client list includes world-leading commercial and institutional research departments, as well as manufacturers of (opto-)electronic components on industrial scale. |
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Features and Options:
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Questions, inquiries, comments?
Telephone: +49 6023 500-463 and -467 |
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