Optimized Geometry
With BOXER, the electron beam evaporator is positioned in the middle of a rectangular chamber, which improves the coating properties. A specially developed 'click and fix' system facilitates the replacement of substrate carriers and thus shortens down times.
Suitable for various uses
From classical broadband anti-reflection coating to absorption layers (protection against the sun) - a great number of different processes can be carried out with BOXER. Moreover, if the demands on the system happen to change, its hardware can easily be expanded.
Features:
- Plug and coat design
- Cubic coating chamber with straight sided walls ensures:
- easy maintenance
- optimized coating geometry
- quick removal of protection shields for cleaning
- Easy maintenance of all components
- Clean room compatible
- Simple click fixing of substrate carrier
- Numerous hardware upgrades available
Technical Data:
- Pumping systems
- Turbomolecular pump (l/s) 1,500
- Rotary-vane pump (m3/h) 65
- Meissner trap (Pumping speed for H2O in l/s) 16,000
- Coating chamber volume (l) 450
- Substrate carrier diameter (mm) 685
- Number of substrates
- Standard substrate carrier
Ø 65 mm 71
Ø 70 mm 62
Ø 75 mm 52
Ø 80 mm 47
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Questions, inquiries, comments?
Get in touch with us at
Telephone: +49 6023 500-463 and -467
E-mail: sales.ophthalmics@leyboldoptics.com
 Technical Data, Processes, Features BOXER (PDF - 52 kb)
Process: Brilliant EMIXX (PDF - 96 kb)
Process: Jade (PDF - 56 kb)
Process: Mirror Coating (PDF - 60 kb)
Process: Optiflex (PDF - 88 kb)
LO-Hydrophobics (PDF - 260 kb)
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