PylonMet - High throughput and flexibility
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The PylonMet VXL is a flexible, high-throughput, batch-type magnetron sputtering system for the coating of 3-dimensional parts.
The swivel type front door allows high productive processing- and loading-unloading sequences. Substrates will be loaded to an easy-to-access pylon or optional to a planetary-substrate-fixuring system. The machine-concept allows a flexible configuration and the accomplishing of a wide range of applications. This includes Magnetron Sputter deposition with IPT (Inter-Pole-Targets) for the high rate deposition of metals and reactive magnetron sputtering with IPT or rotatable targets for the deposition of metal-nitride or metal oxide layers. |
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The advanced MF (Mid Frequency) PECVD (Plasma Enhanced Chemical Vapor Deposition) deposition source allows the deposition of transparent Top Coats and enhanced wipe-resist layers.
Further key-elements are the efficient vacuum pumping system including an effective cryo-coil system and a flexible process-gas-management system. The entire machine is installed into an easy-to-handle steel frame. Features PylonMet VXL:COATING TECHNOLOGY
SYSTEM CHARACTERISTIC
SUBSTRATE LOADING CAPACITY
TYPICAL CYCLE TIME
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 Questions, inquiries, comments?
Telephone: +49 6023 500-463 and -467 |
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