Leybold Optics GmbH

DynaMet 4V - Vertical sputtering for molded parts

The DynaMet 4V is a fully automated, ultra-fast, load/lock type sputtering machine for the coating of 3-dimensional parts. The machine can be integrated to full automated conveyor systems.

The substrates, loaded to a carrier, will be processed sequently by static deposition processes. Backbone of the system are the cycle time optimized drum-type carrier movement system, high rate IPT ( Inter Pole Target ) Magnetron metal deposition sources and a PECVD (Plasma Enhanced Chemical Vapor Deposition) source for the deposition of Top-Coats.

A high efficient pumping system is a further characteristic criteria of the machine.

DynaMet 4V
 

Features DynaMet 4V:

COATING TECHNOLOGY
  • DC Magnetron sputtering of Metals
    (Al, Ti, Cr,…) with IPT cathodes
  • RF (13,56 MHz) PECVD

SYSTEM CHARACTERISTIC

  • Vertical arrangement
  • Load-lock-type circular system
  • Substrate carrier configuration with capability of integration into full automated conveyor system

SUBSTRATE LOADING CAPACITY

  • One carrier per cycle
  • carrier, usable dimension:
    length: 840mm
    width: 440mm
    depth: 250 mm

TYPICAL CYCLE TIME
for aluminium layer plus top-coat:

  • < 35 sec
 

Questions, inquiries, comments? 
Get in touch with us at

Telephone: +49 6023 500-463 and -467
E-mail: contact@leyboldoptics.com



 Technical Data DynaMet 4V (PDF - 128 kb)
ISAL 2009 (PDF - 464 kb)

© 2012 LEYBOLD OPTICS