Photovoltaics: Reaching the next milestone |
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Permanent innovation and rapid advances are key in the photovoltaic industry. Leybold Optics is proud to be part of this innovation race. Since our entry in this sector in 2005, several of our shipped systems have turned into reference customer installations, both in terms of achieved cell efficiency and throughput. A key to success is the development of dedicated, optimized systems for each application. Be it silicon tandem, CIGS or CdTe cells – each of these technologies has its peculiar advantages and challenges. Leybold Optics focuses on the core vacuum deposition sequences in the production chain, thereby leveraging its vast know-how base. Questions, inquiries, comments? Get in touch with us at |
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Machines portfolio overview |
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Leybold Optics is unique in its ample portfolio of systems for all major thin film PV applications. Not only are most of the essential vacuum process steps covered, but also the range in substrate size is impressive: From 1 cm² to 19 m², Leybold Optics can offer the adequate solution. The following overview table gives some guidelines:
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Phoebus
PECVD production tool made for deposition of Silicon layers for thin film PV applications like a-Si/µc-Si (tandem) cells or µc-Si (micro-crystalline) cells on already existing a-Si cells. more... |
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Phoebus Lab Tool
PECVD tool available for R&D and process development purposes of Silicon layers for thin film PV applications on 300 x 300 mm substrate dimensions. more... |
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Vertical sputter
Vertical multi-chamber sputter inline systems for photovoltaic applications. more... |
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Selenium evaporator (SELENIA)
Selenium deposition system for CIGS cell production. more... |
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RTP-oven (HEPHAISTOS)
Rapid thermal processing tool for annealing steps in CIGS cell production. more... |
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Horizontal sputter
Horizontal multi-chamber sputter inline systems for photovoltaic applications. more... |
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Parts, Consumables and Service |
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