Leybold Optics GmbH

Vertical inline sputter systems: Leybold Optics covers all classic PV applications and substrate sizes

Inline sputter systems are a crucial tool in many of today’s thin film solar cell production lines. Classical examples are transparent or metallic front and back contact layers for a broad range of material systems including silicon, cadmium telluride, and CIGS. But also barrier, buffer and absorber layers such as copper-gallium, indium, and i-ZnO, are ideal domains for vertical inline systems. Related applications include layers with electronic and opto-electronic functions, such as for display or touch panels.

The vertical inline sputter configuration offers important advantages:

  • Low particle contamination
  • Suppression of backside coating through optimized substrate carriers
  • Possibility of masking, e.g., edge exclusion
 
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With the A machine family, ranging from the A400V7 R&D system to the A1700V-7 industrial solution, Leybold Optics has achieved an impressive track record of successful photovoltaic operations. Dozens of installed systems have accomplished benchmark levels in uptime, throughput and layer quality. The modular concept and a well designed set of options permit a high degree of flexibility to meet any customer specific requirements.

Our portfolio of machine platforms:

R&D tools and laboratory systems: A400V7, A500V7, A600V7, A900V-7
Production systems: A900V-7, A1500V-7, A1700V-7

Our process portfolio:

AZO, ITO, In, CuGa, i-ZnO, Mo, SiO2 , Si3N4

Proprietary Sputter Cathode Technology

Leybold Optics sputter cathodes are optimized for every application, taking into account peculiarities of magnetic field distributions and target materials. This is made possible by years and years of focused R&D work as well as comprehensive experience gained in production systems. Leybold Optics owns proprietary know-how in sputter technology. Key components and modules are developed, designed, assembled and fine tuned in-house, thus ensuring highest target utilization and optimum layer properties or, in short: maximizing customer benefit.

Technical Features:

  • Flexibility in number and type of magnetrons (planar, rotatable)
  • Static or dynamic deposition method
  • Reduced cross contamination
  • Linear ion source for substrate cleaning / activation
  • Closed loop carrier transportation system
  • Simple flip-over loading / unloading
  • Full automation, sophisticated PLC software package
  • Door mounted process tools, motor driven hinges
  • Easy operation and maintenance

Options:

  • Additional high speed pumps
  • IR heaters
  • Single level or double level installations
  • Own open circuit cooling water system
  • In-situ process control and quality inspection tools
  • Integration in customer’s data handling system, CIM



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Questions, inquiries, comments?
Get in touch with us at

Telephone: +49 351 86695-112 and -83
E-mail: sales.photovoltaics@leyboldoptics.com
 

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