SELENIA: Leybold Optics’ new selenium evaporation system. A member of the CIGS equipment family |
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Leybold Optics has developed and commercializes machines for thin film photovoltaic module production on the basis of CIGS (copper-indium-gallium-diselenide) as absorber material. Leybold Optics is in the unique position to offer the full suite of vacuum equipment for all necessary processes. Starting with barrier and molybdenum sputter deposition on glass substrates, the absorber is formed by sputtering Cu, In and Ga on our vertical or horizontal inline sputter machines. Subsequently, selenium is deposited in the selenium evaporator SELENIA. This proprietary Leybold Optics system uses linear Selenium sources with excellent uniformity. To expand manufacturing time before opening the vacuum vessel, we extend the reservoir of the source and make it possible to change or refill the source whilst continuing production. Compared to non-vacuum evaporator solutions, our system offers far higher levels of operational safety and control. |
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