RaPiT: Leybold Optics’ solution for rapid thermal processing (RTP).
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Leybold Optics has developed and commercializes machines for thin film photovoltaic module production on the basis of CIGS (copper-indium-gallium-diselenide) as absorber material. Leybold Optics is in the unique position to offer the full suite of vacuum equipment for all necessary processes. Starting with barrier and molybdenum sputter deposition on glass substrates, the absorber is formed by sputtering Cu, In and Ga on our vertical or horizontal inline sputter machines. Subsequently, selenium is deposited in the selenium evaporator SELENIA. To create the desired light absorption properties of the compound semiconductor system, this stack has to be annealed in an RTP (rapid thermal processing) process. In our RTP-oven RaPiT, it is possible to form the quadruple (Cu-In-Ga-Se) or quintuple (Cu-In-Ga-S-Se) semiconductor by using the necessary reactive gas. After completing the RTP process, the buffer layer and the i-ZnO and ZnO layers will be generated, preferably again by vertical or horizontal inline sputter coaters. |
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