Phoebus - The highly flexible tool for uninterrupted Silicon Thin Film amorphous / microcrystalline (a-Si/µc-Si) tandem solar cell production |
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With a unique inline-cluster design the PHOEBUS concept is the only one that is especially adapted and engineered for Silicon thin-film applications. In such PHOEBUS customers achieve maximum levels on productivity and quality during daily production. This objective is achieved due to an exceptional design of the process chambers, which guarantees not only highest deposition rates within the PV market, but impressively uniform and reproducible layer characteristics in parallel. |
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| The standard configuration of a PHOEBUS system consists of 15 process chambers with individual pumping stacks for every chamber, to avoid any kind of cross-contamination between adjacent chambers. Furthermore every process chamber can be separated from the transfer tunnel meanwhile all other chambers are kept in normal operation mode. In such the production flow neither is negatively impacted in terms of quality performance nor will be interrupted. Of course but only on a PHOEBUS system every single process chamber can be adapted to our customers needs for parallel deposition of any kind of layer characteristics like: amorphous (a-Si), microcrystalline (µc-Si), intrinsic, p-doping, n- doping, interreflective (IR) layers Based on above mentioned conceptual, technological and performance figures, PHOEBUS customers can be sure, that their production capabilities will not only be extremely economical and on highest technological level by today, but is dedicated to meet future market demands, too. |
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Exceptional layer qualitiesMost difficult for manufacturing a-Si/µc-Si tandem cells is to achieve highly uniform and reproducible microcrystalline layer for the bottom cell formation.The picture shows a typical result in absolute percentage of the crystallinity measured on a Raman spectrograph of a 1’100 x 1’400 mm substrate coated by a PHOEBUS production tool. In this case an excellent value for the statistical standard deviation is achieved of: Sigma = 1.73% Regarding uniformity standard deviation levels less than 2.4% have already been achieved. Multi-purpose toolPHOEBUS equipment can be used for the formationsingle junction, tandem junction or even triple junction cells. Therefore this machine can be e.g. perfectly integrated in already existing a-Si manufacturing surroundings for a capacity and module performance upgrade from single junction (a-Si) to tandem junction (a-Si/µc-Si) cells and modules. In such a case the necessary second and so called bottom cell is applied on existing amorphous cells manufactured on already existing equipment. In case the existing equipment is stopped, the PHOEBUS can take over this manufacturing step, too, for the deposition of the entire tandem cell. Features:
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Questions, inquiries, comments?
Telephone: +49 351 86695-112 and -83 |
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Technical Data:
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