Horizontal inline sputter systems: the solution for high throughput and large substrates |
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Inline sputter systems are a crucial tool in many of today’s thin film solar cell production lines. Classical examples are transparent or metallic front and back contact layers for a broad range of material systems including silicon, cadmium telluride, and CIGS. But also barrier, buffer and absorber layers such as copper-gallium, indium, and i-ZnO, are ideal domains for inline sputter systems. The horizontal inline sputter configuration offers important advantages:
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Leybold Optics’ H machine family comprises two platforms: H1700 and H3200. Both are conceived for large-scale industrial production, high throughput and minimum cost of operation. Our process portfolio: AZO, ITO, In, CuGa, i-ZnO, Mo, SiO2 , Si3N4 Proprietary sputter cathode technologyLeybold Optics sputter cathodes are optimized for every application, taking into account peculiarities of magnetic field distributions and target materials. This is made possible by years and years of focused R&D work as well as comprehensive experience gained in production systems. Leybold Optics owns proprietary know-how in sputter technology. Key components and modules are developed, designed, assembled and fine tuned in-house, thus ensuring highest target utilization and optimum layer properties or, in short: maximizing customer benefit. |
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Telephone: +49 351 86695-112 and -83 |
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