BAK 600 - Thermal Evaporation System
| Machine description: | BAK 600 |
| Year of manufacture: | 1987 |
| Manufacturer: | Balzers |
Description
The BAK 600 is a high vacuum 'Box coating System' and is suitable for small to medium capacity requirements. The wide range of applications in electronics and opto-electronics makes the BAK 600 system suitable for universal application in development and production. The vacuum chamber is made of stainless steel and has a usable area of 652mm Wide x 697mm High x 573mm Deep. The chamber is water cooled for both hot and cold supplies. The system is currently configured for two thermal evaporating positions each with its own process shutter. There is a glow cleaning system installed for substrate preparation. The number of substrates handled by the standard calotte with a diameter of 600 mm is 79 pieces for a 55mm x 55mm component size.
Main Features
The system will be supplied fully refurbished and modified with the Leybold Optics replacement LAB controller. The old control system is discarded and replaced with a new PLC based unit mounted in new 19" racks. This is a fully automated process control system and uses the Inficon Film thickness monitor for the layer control. The vacuum measurement is replaced with new Leybold Optics devices. New Vacuum pumps and water manifold bring this machine up to a modern standard. If necessary the system can be modified and configured for Electron beam gun evaporation.
