SYRUSpro family - The flexible and productive coating system family in precision optics
The SYRUSpro family is ready to face any demands that precision optics can possibly make on a coating system. It has a novel process control system that convinces with maximum automation. Besides great flexibility, this system guarantees the highest performance and productivity.
Optical and physical monitoring
A great variety of components allow the SYRUSpro systems to be individually adapted to our customers' requirements. Apart from optical monitoring on the basis of our OMS 5000, a physical monitoring system can also be employed to achieve perfect coating results.
Fit for clean room use
The SYRUSpro systems are available with chamber diameters between 700 and about 1,500 millimeters. All systems are also suitable for clean room use. SYRUSpro CFM was especially developed for digital-optical uses, such as UV/IR and color filters. SYRUSpro DUV, optimized for 193 nm, takes on any DUV tasks.
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