OMS 5000 OPTATEC 2008: new quality standards in precision optics thanks to optical monitoring directly on the substrate
For more than 150 years LEYBOLD OPTICS (LO) has been a pioneer and trailblazer in the field of vacuum technology. Its unique pioneering spirit makes the company from Alzenau one of the worldwide leading manufacturers of coating systems for the precision optics and telecommunication industries. The high-performance HELIOS systems and the SYRUSpro family have profited from the broad know-how and expertise of the engineers at LO. The in-house research and development department continually works on intelligent innovations and improvements -like the optical monitoring system 'OMS 5000', for instance.
To match the increasing demands for accuracy and to achieve the optical performance required, it is necessary to measure the optical thickness of the coatings directly during the deposition process. Up to now, the measurement has been performed on stationary test slides. The disadvantage is that the test slides are located in the centre of the chamber. The accuracy of the measurement is limited, because the calotte is rotating. The accuracy is the highest in the centre, but most of the substrates are located on the outside position of the calotte. Now the OMS 5000 system presented by LEYBOLD OPTICS offers monitoring of optical thin film layers directly on the calotte with high repeatability, supported by high signal resolution, low signal noise and multi-wavelength capability.
The test slide for measurement of the layers is located directly on the calotte of the vacuum system. This allows for a more straightforward set-up of the coating system runs. Calibration batches can widely be avoided, i.e. it is possible to change the machine from one design to another very quickly. Control wise, the device is integrated into the architecture of the company's SYRUSpro system family.
The accuracy of the measurement has been improved significantly by avoiding the tooling factor between a stationary test slide and the rotating calotte. Such a feature is particularly valuable in mass production, where from batch to batch, over the calotte tight filter specifications are now achievable. The direct measurement is located on an outside position of the calotte. By this arrangement the highest accuracy will be achieved on the areas with the highest number of substrates.
Especially for users of LEYBOLD OPTICS' SYRUSpro systems, the features of the OMS 5000 create a win-win situation: LO's powerful coating system reaches high-precision results even at the most difficult filter specifications. The system does not only secure a surplus value for SYRUSpro, but guarantees customers lasting investments, too. For users of LEYBOLD OPTICS intelligent solution one thing stands undisputed: they will 'stay one step ahead' in the future as well.
