Pegasus: Advanced In-Line systems for display applications
Knowing the critical points of existing In-Line machines, the engineers of LEYBOLD OPTICS focused on optimizing or even eliminating the trouble spots in this field and have developed a new platform to bring outstanding benefit to their customers. The so-called Pegasus, a new type of sputtering system, which can handle even the biggest current substrates up to Gen 7.5 or 8, has become a reality.
We are now presenting our Pegasus system to the experts in a specialist talk titled 'Advanced In-Line systems for display applications up to Gen 7.5'. On the basis of our long-tried and well-tested technology we have developed an entirely new generation of systems which do not only offer a new type of processing possibilities, but also set unprecedented standards of quality.
Formerly, problems in the processing of substrates for the display industry included poor target utilization, high particle generation and the difficulty of exchanging the targets. With the new Pegasus system LEYBOLD OPTICS has now been able to improve on all these trouble spots.
Based on the new moving target principle the LO engineers achieve a target utilisation and a process stability that will set new standards for display application. This cost saving factor is accompanied by highly-reduced particle generation, which leads to an increased production yield. The maintenance-friendly modular composition with a newly-designed gate valve driven by an electromagnet assures reliability. There are no potential leaks, which reduces unscheduled downtime and offers a high-volume and high-yield production system that meets or exceeds customers’ expectations.
