HELIOS: System of many talents
Alzenau, 01/2005
A small unit, a system of many talents, extremely reliable at reasonable maintenance costs - that is what the industry has been waiting for. Optical coatings play a major role in optoelectronics as well as in semiconductor applications, nevertheless perfect results have seldom been achieved - the optical production tools were not compatible to semiconductor standards, and the semiconductor tools did not stand out in optics by really good layer properties. LEYBOLD OPTICS (LO) has now found the solution to this problem.
The new HELIOS system developed in Alzenau convinces with a unique reactive magnetron sputter process, which allows coatings of excellent quality and a high throughput for optical and electronic applications as well as for mechanical ones. Dielectric or metal layers and combinations of both - no problem with HELIOS.
LO has equipped its latest development with a quick load-and-lock system for use in the semiconductor industry. A cassette module automatically transfers the substrates - manual feeding is no longer necessary, which makes the new unit suitable for clean room use.
HELIOS is a multi-talent in precision optics producing colour, UV and IR-cut filters or beam splitters of high quality. CWDM filters or AR coatings on micro-optical devices are conceivable in telecommunications. AR- and HR-coatings of unequalled quality on laser diodes or wave guides on sensors are some of the applications in optoelectronics.
