Optical Monitoring OMS 5000 direct on the calotte from Leybold Optics - The breakthrough in precision of optical monitoring
Alzenau, 08/2006
The OMS 5000 system presented by Leybold Optics offers direct monitoring of optical thin film layer deposition with high repeatability, supported by high signal resolution, low signal noise and multi-wavelength capability.
The test slide for measurement of the system is located directly on the calotte of the vacuum system, which allows for a more straightforward set-up of the coating system runs. Calibration batches can widely be avoided, i.e. it is possible to change the machine from one design to another very quickly. As a result, sophisticated filter designs, such as multiple-cavity filters, narrow-band-line filters and others, can now be achieved on the calotte. Control wise, the device is integrated into the architecture of the company's SYRUSpro system family.
The OMS 5000 provides a transmittance measurement directly on the substrate of the calotte. The accuracy of the measurement has been improved significantly by avoiding the tooling factor between a stationary test slide and the rotating calotte. Such feature is particularly valuable in mass production, where from batch to batch over the calotte tight filter specifications are achievable.
The direct measurement is located on the outside position of the calotte. By this arrangement the highest accuracy will be achieved on the areas with the highest number of substrates. Accuracies for repeatability and uniformity of +/- 0,5 % has been demonstrated on a 1,4 m diameter calotte of a SYRUSpro 1510, +/- 0,3 % on a 1 m diameter calotte of a SYRUSpro 1110.
About LEYBOLD OPTICS
As a prominent manufacturer of vacuum coating systems and developer of processes for the thin film technology, LEYBOLD OPTICS is represented in thirteen countries worldwide. The main focus of our processing technologies is on evaporation, sputtering and plasma-assisted coating processes for display technology, ophthalmics, precision optics, reflective and protective coatings, web coating, R&D, and special applications.
The basis of our success was laid in Germany 150 years ago by Ernst Leybold and Wilhelm Carl Heraeus. They addressed their pioneering spirit to the search for new manufacturing processes and founded our internationally recognized vacuum-technology company, which has set market standards ever since.
