Lab & Cluster family - The system series based on electron beam or sputtering technology
The unrivalled combination of box or cluster-type vacuum chambers of various sizes and shapes with a wide spectrum of plasma, electron or ion-beam based coating and treatment tools makes almost any wish come true. Depending on customers' demands on substrate size, thin film composition, tact time and budget, stand-alone box-type vacuum vessels of sizes between 500 and 1820 millimeters in width can be chosen.
Big variety of deposition tools
Apart from having water-cooled walls and being made of stainless steel, two lab or cluster coating systems may be quite different from each other. The composition and the quality of the coating and the nature of the substrates define the choice of deposition tools: thermal or electron-beam evaporation, all variations of sputtering, all processes supported by ion beams for film morphology control or a range of chemical vapor deposition techniques.
Flexible substrate management
Substrates can be under full temperature control, cooled or heated. They can be placed on turntables, calottes or planetary drives if extreme coating uniformity was desired. Of course, all lab and cluster systems are operated by a PLC with a sophisticated software package.
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