In-Line Systems – High quality at high throughput
Large volume production of thin film coatings at low tact times is certainly not a challenge for LEYBOLD OPTICS. Whether it is large area metallic or ceramic coatings on flat, rigid substrates or large numbers of smaller substrates arranged in a large size tray, there will always be a perfectly suitable In-Line coating system available.
The full spectrum of magnetron sputtering
Both carrier-based vertical and horizontal In-Line coating systems consist of a single or double load-lock stage for substrate transfer into and out of the vacuum environment. The systems can be fitted with a selection of magnetron sputtering cathodes of planar or cylindrical shape, or the newly designed moving-target cathode. Supplied with electric or electromagnetic power in DC, pulsed DC, mid-frequency or radio-frequency mode, substrates are coated by target material in a direct or reactive regime while passing the cathodes.
Vertical or horizontal In-Line Coaters
A carrier-based vertical In-Line coating system should be the preferred choice in the case of anticipated particle contamination. Horizontal In-Line systems for large flat substrates are usually equipped with a maintenance-friendly carrier-free roller transport system but can be fitted with a carrier-based transport if required. System height or width is individually adjusted to accommodate the designated target lengths of the respective magnetron sputter cathodes.
