Customized Systems – Individual solutions for complex requirements
'If there was no suitable standard platform at hand, an entirely new system would have to be designed in order to accommodate the customer's process' - engineers and scientists at LEYBOLD OPTICS are always ready for the next challenge. A number of very special and capable vacuum coating systems have emerged in the past as a result of such an innovative attitude.
NESSY – A unique answer to a unique challenge
NESSY is an ultra-high vacuum coating system with load-lock based substrate handling for the precision coating of optical mirrors used for extreme UV lithography (~ 13.4 nm wavelength). The machine is equipped with magnetron sputtering cathodes for thin film uniformities as low as 0.1 percent on substrates of 300 millimeters in size.
Special systems for special applications
The A 1105 UHV is an ultra-high vacuum system which has been designed and built for the precision coating of CaF optical lenses used in deep UV lithography (~ 153 nm wavelength). The system is equipped with high precision evaporation technology.
LAB 1820 TH is a unique coating system for the production of spatially resolved scintillator crystals on planar substrates as large as 500 by 500 millimeters employing thermal evaporation without the use of troublesome shadow masks.
LAB 900 GLL is a specialized system for wafer level packaging of integrated circuits. Glass-like thick films are deposited by means of electron beam evaporation using an automated material replenishment system.
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